Applied Material Parts
0020-00991  Hex Cover 150mm

0020-04018  Pedestal 150mm

0020-04257  Pedestal 125mm

0020-06231  Hex Cover 125mm

0020-06447  Insulator Cap

0020-06754  Hex Cover 100mm

0020-06997  Pedestal 125mm

0020-10117  TEOS Perf Plate  200mm

0020-10119  Perf Plate 150mm

0020-10120  TEOS Perf Plate 150mm

0020-10122  Perf Plate 125mm

0020-10204  Susceptor Plate 200mm

0020-10936  Blocker Plate 200mm

0020-10771  TEOS Perf Plate  150mm

0020-23811  Collimator  .625 thick

0020-24812  Collimator  .750 thick

0020-30086  Perf Plate 150mm

0020-30195  Cover

0020-30111  Blocker Plate 200mm

0020-30406  Perf Plate 150mm

0020-30407  Perf Plate 200mm

0020-30580  Blocker Plate 150mm

0020-30797  Perf Plate 200mm

0020-30816  Gas Distribution Plate  13 hole

0020-30919  Susceptor Plate 200mm

0020-31088  Susceptor Plate 200mm

0020-31488  Gas Distribution Plate  13 hole

0020-31490  Gas Distribution Plate  37 hole

0020-31492  Gas Distribution Plate 101 hole

0020-31493  Gas Distribution Plate 133 hole

0020-31547  Gas Distribution Plate 101 hole

0020-31548  Gas Distribution Plate 133 hole

0020-31620  Susceptor Plate 200mm

0020-31789  Cover

0020-31804  Gas Distribution Plate 80 hole

0020-31831  Chamber Lid

0020-32036  Blocker Plate 200mm

0020-32259  Gas Distribution Plate 119 hole

0020-32260  Gas Distribution Plate 37 hole

0020-32262  Gas Distribution Plate 133 hole

0020-32263  Gas Distribution Plate 145 hole

0020-32952  Susceptor Plate 200mm

0020-33538  Perf Plate

0020-34293  Chamber Lid

0020-34297  Chamber Lid

0020-34444  Face Plate  200mm

0020-34445  Blocker Plate 200mm

0020-42285  Blocker Plate 200mm

0020-42287  Perf Plate 200mm

0020-60007  Susceptor Plate 125mm

0020-60033  Susceptor Plate 150mm

0021-00041  Face Plate 200mm

0021-01569  Blocker Plate 200mm

0021-01572  Face Plate  200mm

0021-02306  Face Plate  200mm

0021-03637  Face Plate     

0021-09007  Chamber Lid

0021-09008  Chamber Lid

0021-09909  Face Plate  200mm

0021-09914  Blocker Plate 200mm

0021-38119  Face Plate  200mm

0200-09744 Ring Focusing QTZ 150mm Poly.msi

0200-09158 WINDOW,HEATER,CVD CHAMBR

0200-09035 PIN WAFER LIFT 6"

0020-30678 Vespel Clamp Ring

3690-01544 Vented Screw

If you didn't find parts in the list please contact us, we will work for you
P: 909-923-2665
F: 909-
923-2699
sales@broadtechsystem.com

Ontario, CA 91761 USA
P: 909-923-2665
F: 909-
923-2699
sales@broadtechsystem.com

Ontario, CA 91761 USA