ASM E2 & E2000 Reactor Parts List

02-327875D01 ASSY-TC-FRONT/SIDE-BIJUNCTION

02-323653D01 ASSY-THERMOCOUPLE-REAR

02-323654D01 ASSY-THERMOCOUPLE-SIDE

02-323584D01 ASSY-THERMOCOUPLE-CENTER

16-332090E01 Chamber - Square 200mm RP

16-330320E01 ATM Chamber Long Tubulation

16-321908C01 LAMP-LINEAR-TUNGSTEN HALONGEN-6KW

02-351233C01 MULTIPORT INJECTOR CARTRIDGE

16-321410C01 LIFTER-SUSCEPTOR

16-321411C01 LIFTER-SUSCEPTOR-RING

16-321412C01 ROD-PULL

3553116-01 DIAPHRAGM-BLOW OUT PORT

16-320174B03 GASKET-RESTRICTOR 3 SLM-N2

04-323738A01 Transducer±Torr

65-106645A22 Transducer 0-100 Torr

65-106645A14 Transducer 0-1000 Torr

65-106645A48 Transducer 0-1 Torr

16-323855D01 REFL-S/D-SINGLE PARABOLIC

16-328615D01 REFL-D-CENTER-UPR-LAMP ARRAY

3652556-01 REFLECTOR-SPHERICAL

16-323394D02 MANIFOLD-UPPER-RP-LH

16-323394D01 MANIFOLD-UPPER-RP-RH

02-323618D01 ASSY-REFL-S-SIDE-WATER COOLED-RP-RH

02-323618D02 ASSY-REFL-S-SIDE-WATER COOLED-RP-LH

89-106286A09 High vacuum grease

04-350423-03 KIT-RP REACTOR CHAMBER O-RINGS

04-326857A01 KIT-RP EXHAUST FLANGE O-RINGS

04-323035A02 KIT-ENCLOSED O-RING SETLGE WDO

04-321308A01 KIT-GATE VAVLE GASKET SET

04-350321-02 KIT-MULTIPORT FLANGE O-RING-SQR

60-106222A11 SEAL-CENTERING RING-NW80SS/VITON

16-320127C01 BELLOWS ASSY-ROTATION

16-333427D01 Reflector-S-Plate- Flashlight w/2 Notches

16-323881D01 Reflector-S-Weldment-Spotlight

3652556-01 Reflector-S-Spheric

16-323586C01 Shaft Assy Suspector-RP

60-119075A71 O-Ring 93-500/70D

02-323029C01 Pressure Switch 1psi

02-327875D01 Assy-Qtz-Front/Side TC-200mm

60-122483A67 O-Ring 6-001 white viton

16-336124B01 Bracket-WFR ROT-CPLIN INTFC

16-336125B01 Standoff Male

16-336123B01 Bracket-CTR TC Support

21-106905A18 Screw-SHC4-40x0.385SS

16-331698C01 Support-Susc-Hot/Cold Centering

02-323584D01 Assy, Y Qtz-Center TC RP-Diffuse

16-323957B01 Insulator Cover

16-324575E01 Chamber-Process-Quartz-150mm RP

02-323647D01 Assy-Qtz-Front TC-150mm

02-323649D01 Assy-Qtz-Side-TC-RP-150mm

02-323648D01 Assy-Qtz-Rear TC-150mm

02-327875D01 Assy-Qtz-Front/Side TC-200mm

02-323653D01 Assy-Qtz-Rear TC-200mm

02-323654D01 Assy-Qtz-Side-TC-RP-200mm

02-323584D01 Assy Y Qtz-Center TC RP-Diffuse

16-320958B01 H2 Detector-modified

16-323876D01 Reflector-S-Light Dam-upper Shiny

03-322711A02 PCB Assy.32 Digout

03-322710A02 PCB Assy.32 Digin

54-106931A14 Controller-Speed-90/130VDC-120VAC

47-107337A15 Signal isolator

If you didn't find parts in the list please contact us, we will work for you
P: 909-923-2665
F: 909-
923-2699
sales@broadtechsystem.com

Ontario,  CA 91761 USA
P: 909-923-2665
F: 909-
923-2699
sales@broadtechsystem.com

Ontario, CA 91761 USA