B T S
Broad Tech System, Inc.
Provide Equipments & Silicon Materials to Semiconductor Industry
Ultratech Stepper Model#1000
4", 5", or 6", with automation, intelligent, or manual loader.
4", 5", or 6", with automation, intelligent, or manual loader.
It can also be configured for round wafers with major flats.
It is fully operational to manufacturer's specifications.
It is fully operational to manufacturer's specifications.


Configuration

- Wafer Size:               2", 3", 4", 5", 6"

- Loader Type:             Automation, Intelligent

- Computer:                 HP 362 with internal hard Disk

- Lamp Power Supply:  HA500-B

- Crossmasks:              140um
P: 909-923-2665
F: 909-923-2699
sales@broadtechsystem.com

Ontario,  CA  91761 USA
Ultratech Stepper Model#1100
This stepper has the same lens and field size as model 1500
system. It is capable of resolving 1.2 micron lines and spaces
in a production environment, and 1.0 um lines and spaces in
an R&D environment, for substrates sizes 2", 3", 4", 5", 6", or
8", with automation, intelligent,or manual loader. It can also be
configured for round wafers with major flats,notched wafers,
and square substrates. It is fully operational to manufacturer's
specifications.

Configuration

- Wafer Size:               2", 3", 4", 5", 6" or 8"

- Loader Type:             Automation or Manual

- Computer:                 HP 362

- Lamp Power Supply:  UA-UPR500-C

- Crossmasks:              0.4 HAMS, 140um

- Reticle Slider:             3" x 5" Hybrid, Skew Adjustable
              via screws            
Canon PLA-501F/501FA/600F Mask Aligner
Canon PLA-501F,PLA501FA, PLA600F Features:

- Contact/Proximity Alignment

- Fiber Optic Illumination viewing optics with this 150 Watt
Illumination System

- High Resolution Video

- Wafer Sizes: 2" to 6" Semi Spec, Pieces, Squares

- Wafer Feed: Manual and/or Cassette to Cassette Auto Feeder

- Alignment: Manual / Automatic
- UV Power: 250, 350, 500 Watts, 1 and 1.5 Kilo Watts

- UV Spectrum: Deep UV, NEAR Deep UV, Near UV
Resolution: Less Than .4um in Hard Contact
Canon PLA501/600 Converging Kit
Gap Checking Unit
Gap Setting Unit
Varian 3290 / 3190 / 3180 system
3290 system sets the pace for state-of-the-art wafer sputtering, this
new system is based upon the widely accepted and field-proven
design of the acclaimed 3280. It provides significant improvements
for even greater performance and reliability.

System Features:

- Up to three Quantum deposition stations for extended versatility.

- Combined Preheat and RF etch station for sequential or
simultaneous    wafer preconditioning.

- Vacuum Isolated Preprocess Station (VIPS) for multi-level metal
applications.

- ViaFiTM for 100% step coverage with aluminum alloy films.

- SECS II host computer interface software.

- Multipass software permits sequential layering of dissimilar metals
for hillock control.
3190 system offer automated cassette-to-cassette processing,
eliminating the need for operator loading or handling of individual
wafers. Each wafer is automatically removed from the cassette,
transferred into the vacuum chamber through a load lock, indexed
serially through four process stations, and then returned to its
original slot in the cassette.

Wafer handling and processing in the 3190 systems are automated
by four separate microprocessors. Communication between the
microprocessors allows the system to process wafers in an efficient
and user-friendly manner, with operator interaction provided by a
touch-panel CRT screen. The system prompts the operator when to
load and unload, and runs unattended between loadings.
Eaton & Varian Ion Implanters
We offer turnkey solution for Ion Implanter and Vacuum System,
we continue to provide complete refurbishment service for Eaton
& Varian implanter systems, and also including refurbishes all
legacy and advanced technology high current implanter disks and
components, from Axcelis (Eaton) & Varian, to meet or exceed
Original Equipment (OEM) specifications with silicon coating
technology. It will result in superior wafer cooling, longer coating
life and better contamination control, refurbished Ion Implanter
systems including:

- VARIAN 350D,CF3000, 300XP

- EATON NV10-160,NV10-80.

- NV6200A/AV.

- VARIAN E1000,E500.

- DATA AQUISITION SYSTEMS.

- AMAT 9200, 9500.

- AXCELIS GSD'S, 8250.
Looking for Equipment? Please contact us:  sales@broadtechsystem.com
we also carry refurbished and AS IS condition tool for CHA
Mark50, Canon MPA500 mask aligner,FPA1550,2000iI stepper
Gasnic Aura1000,3010, Matrix105/205/303/403,FSI Mercury
MP/OC, Semitool 4"/5"/6"/8", Verteg 1600-34/44/55, 1800-6,
Veeco, etc., and more...
© Copyright 2007 Broad Tech System Inc. - All rights reserved.