B T S
Broad Tech System, Inc.
Provide Engineering Service & Parts  to Semiconductor Industry
Spare Parts Line Card
We have extensive semiconductor spare parts inventory. We offer
new OEM spare parts & surplus parts for semiconductor equipments
including:

- AMAT 8110, 8330,P5000  
Check Parts List

- ASM E2 & E200 Reactor  Check Parts List

- ASML

- Canon Mask Aligners : Canon PLA-501F,PLA-501FA, PLA-600F,
MPA-500.

- Canon Stepper: FPA-3000i4/i5/iW, FPA-2500i3, FPA-2500i2,
FPA-2000i1,FPA-1550Mk4W  

- CHA Mark50

- Eaton and Varian Ion Implanter: Varian 350D,CF3000, 300XP
Eaton NV10-160, NV1-80, NV6200A/AV. Varian E1000, E500
AMAT9200, 9500, Axcelis GSD's, 8250

- FSI Mercury MP & Mercury OC

- Gasonic Aura 1000, 3010

- KLA-Tencor SFS-4500/5500, SFS-6XXX

- Lam 490, 590, 4400 and 4520
Check here  

- Matrix 105, 205, 303,403

- Nikon Stepper                                              

- Novellus CVD & PVD concept 1 and concept 2

- Solitec

- SVG86,88 series                      

- Semitool 4" 240/440/840, 5" 260/460/860, 6" 270/470/870,
8" 280/480/880, 12" 2300/4300/8300

- Tegal 901e, 903e

-Thermco TMX Series Furnaces 4100,4300, 4700, 4900. 5100. 5200
Series

- Ultratech Stepper: 900,  1000, 1100, 1500

- Verteg 1600 & 1800 Series      

- Varian3180,3190,3290                    

- Veeco

- WaferMarkII

We also provide high quality refurbished Mass Flow Controller
including: Brooks,Millipore, MKS, STEC, Tylan, Unit.
Request a quote? Please contact us: sales@broadtechsystem.com
© Copyright 2007 Broad Tech System Inc. - All rights reserved.
Tel: 909-923-2665
Fax: 909-
923-2699
sales@broadtechsystem.com

Ontario,  CA 91761 USA